%0 Journal Article
%T High-rate directional deep dry etching for bulk silicon micromachining
%A Esashi, M
%A Takinami, M
%A Wakabayashi, Y
%A Minami, K
%J Journal of Micromechanics and Microengineering
%V 5
%N 1
%@ 0960-1317
%D 1995-03-01
%~ DeepDyve