%0 Journal Article
%T Direct die-to-database electron-beam inspection of fused silica imprint templates
%A Tsuneoka, M.
%A Resnick, D. J.
%A Wakamori, H.
%A Ainley, Eric
%J Proceedings of SPIE
%V 6349
%N 1
%P 63492D-63492D-8
%@ 0277-786X
%D 2006-10-06
%I SPIE
%~ DeepDyve