%0 Journal Article
%T Removal function and chemical composition of RS-SiC surface processing by atmospheric pressure plasma processing
%A Song, Li
%A Xu, Xueke
%A Dun, Aihuan
%A Wu, Lunzhe
%A Wang, Zhe
%J Proceedings of SPIE
%V 11427
%P 114272I-114272I-11
%@ 0277-786X
%D 2020-01-31
%I SPIE
%~ DeepDyve