%0 Journal Article
%T Practical phase control technique for alternating phase-shift mask fabrication
%A Takahashi, Masahiko
%A Miyake, Akihiro
%J Proceedings of SPIE
%V 4066
%N 1
%P 394-400
%@ 0277-786X
%D 2000-07-19
%I SPIE
%~ DeepDyve