%0 Journal Article %T Advances in Atomic Layer Deposition %A Zhang, Jingming %A Li, Yicheng %A Cao, Kun %A Chen, Rong %J Nanomanufacturing and Metrology %V 5 %N 3 %P 191-208 %@ 2520-811X %D 2022-09-01 %I Springer Nature Singapore %~ DeepDyve