%0 Journal Article
%T Advances in Atomic Layer Deposition
%A Zhang, Jingming
%A Li, Yicheng
%A Cao, Kun
%A Chen, Rong
%J Nanomanufacturing and Metrology
%V 5
%N 3
%P 191-208
%@ 2520-811X
%D 2022-09-01
%I Springer Nature Singapore
%~ DeepDyve