%0 Journal Article
%T The evolution of morphology and chemistry in fused silica surface after medium-pressure plasma processing
%A Yadav, Hari Narayan Singh
%A Das, Manas
%J Journal of Micromanufacturing
%V OnlineFirst
%P 1
%@ 2516-5984
%D 2025-01-01
%I SAGE Publications
%~ DeepDyve