%0 Journal Article
%T Implementation of x-ray methods for investigation of nanosize semiconductor structures
%A Gerasimenko, Nikolay N.
%J Proceedings of SPIE
%V 5943
%N 1
%P 59430A-59430A-24
%@ 0277-786X
%D 2005-07-07
%I SPIE
%~ DeepDyve