%0 Journal Article
%T Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymers
%A Zhang, Chao
%A Leskelä, Markku
%A Ritala, Mikko
%J Coatings
%V 11
%N 9
%@ 2079-6412
%D 2021-09-16
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve