%0 Journal Article
%T MODULIGA: The LIGA process as a modular production method-current standardization status in Germany
%A Hahn, L.
%A Meyer, P.
%A Bade, K.
%A Hein, H.
%A Schulz, J.
%A Löchel, B.
%A Scheunemann, H.U.
%A Schondelmaier, D.
%A Singleton, L.
%J Microsystem Technologies
%V 11
%N 5
%P 240-245
%@ 0946-7076
%D 2004-01-01
%I Springer-Verlag
%~ DeepDyve