%0 Journal Article %T Concentration of nano-sized objects in plasma-chemical material: estimation by tunnel resonance method %A Platenkin, A %A Chernyshov, V %A Chernyshova, T %J Journal of Physics: Conference Series %V 1145 %N 1 %P 8 %@ 1742-6596 %D 2019-01-01 %~ DeepDyve