%0 Journal Article
%T Calculation of film stress from pitch measurements in LCD panel manufacturing
%A Burdette, Steven R.
%J Journal of the Society for Information Display
%V 23
%N 3
%P 107-112
%@ 1071-0922
%D 2015-03-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve