%0 Journal Article
%T Ultra-Shallow Junction Formation using Implantation    through Capping Nitride Layer on Source/Drain Extension
%A Hsien, Li Jen
%A Chan, Yi Lin
%A Chao, Tien Sheng
%A Jiang, Yeu Long
%A Kung, Chung Yuan
%J Japanese Journal of Applied Physics
%V 41
%N 7R
%@ 0021-4922
%D 2002-07-01
%~ DeepDyve