%0 Journal Article
%T Novel test structures for characterization of microsystems parameters at wafer level
%A Shaporin, Alexey
%J Proceedings of SPIE
%V 7206
%N 1
%P 72060E-72060E-12
%@ 0277-786X
%D 2009-02-12
%I SPIE
%~ DeepDyve