%0 Journal Article %T In situ deposition of epitaxial PZT films by pulsed laser deposition %A Wang, Zhan Jie %A Maeda, Ryutaro %J Proceedings of SPIE %V 5648 %N 1 %P 89-96 %@ 0277-786X %D 2004-02-16 %I SPIE %~ DeepDyve