%0 Journal Article %T A prototyping and microfabrication CAD/CAM tool for the excimer laser micromachining process %A Mutapcic, Emir %A Iovenitti, Pio %A Hayes, Jason %J The International Journal of Advanced Manufacturing Technology %V 30 %N 12 %P 1076-1083 %@ 0268-3768 %D 2005-11-24 %I Springer-Verlag %~ DeepDyve