%0 Journal Article
%T Control method of pull-in voltage on the MEMS inertial switch integrating actuator and sensor
%A Deng, Jufeng
%A Liu, Chong
%A Hao, Yongping
%A Liu, Shuangjie
%A Meng, Fanjian
%A Xu, Pengpeng
%J Microsystem Technologies
%V 23
%N 10
%P 4785-4795
%@ 0946-7076
%D 2016-12-21
%I Springer Berlin Heidelberg
%~ DeepDyve