%0 Journal Article
%T A solid hydraulically amplified piezoelectric microvalve
%A Wu, Xiaosong
%A Kim, Seong-Hyok
%A Ji, Chang-Hyeon
%A Allen, Mark G
%J Journal of Micromechanics and Microengineering
%V 21
%N 9
%P 11
%@ 0960-1317
%D 2011-09-01
%~ DeepDyve