%0 Journal Article
%T Laser doping of silicon carbide substrates
%A Salama, I.
%A Quick, N.
%A Kar, A.
%J Journal of Electronic Materials
%V 31
%N 3
%P 200-208
%@ 0361-5235
%D 2002-04-02
%I Springer-Verlag
%~ DeepDyve