%0 Journal Article
%T Double-grating lateral shearing interferometer for EUV optics at-wavelength measurement
%A Liu, Zhiqiang
%A Niibe, Masahito
%A Murakami, Katsuhiko
%J Proceedings of SPIE
%V 5752
%N 1
%P 663-672
%@ 0277-786X
%D 2005-05-10
%I SPIE
%~ DeepDyve