%0 Journal Article
%T New material processing of AIN ceramic with femtosecond, nanosecond, and microsecond laser ablation
%A Yabe, Hiroyuki
%J Proceedings of SPIE
%V 4065
%N 1
%P 868-875
%@ 0277-786X
%D 2000-08-16
%I SPIE
%~ DeepDyve