%0 Journal Article
%T Effect of sputtering power on surface characteristics and crystal quality of AlN films deposited by pulsed DC reactive sputtering
%A Takeuchi, Hiroto
%A Ohtsuka, Makoto
%A Fukuyama, Hiroyuki
%J Physica Status Solidi (B) Basic Solid State Physics
%V 252
%N 5
%P 1163-1171
%@ 0370-1972
%D 2015-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve