%0 Journal Article
%T Visual detection method for alignment errors in grating displacement measurement systems
%A Li, Shuhang
%A Yu, Yue
%A Xu, Jing
%A Wang, Tingting
%A Zhao, Huijuan
%J Proceedings of SPIE
%V 13688
%P 136882F-136882F-5
%@ 0277-786X
%D 2025-07-28
%I SPIE
%~ DeepDyve