%0 Journal Article
%T Synthesis of Zn-doped colloidal SiO2 abrasives and their applications in sapphire chemical mechanical polishing slurry
%A Lei, Hong
%A Huang, LiQin
%A Gu, Qian
%J Journal of Materials Science: Materials in Electronics
%V 28
%N 2
%P 1229-1237
%@ 0957-4522
%D 2016-09-02
%I Springer US
%~ DeepDyve