%0 Journal Article %T Fabrication of a porous SiO2 thin film with an ultralow refractive index for anti-reflective coatings %A Suzuki, Ryoko %J Journal of Sol-Gel Science and Technology %V 106 %N 3 %P 860-868 %@ 0928-0707 %D 2023-06-01 %I Springer US %~ DeepDyve