%0 Journal Article %T A Method Integrating Optimal Algorithm and FEM on CMOS Residual Stress %A Chuang, W. C. %A Lin, David T. W. %A Hu, Y.-C. %A Lee, H.-L. %A Cheng, C.-H. %A Chang, P.-Z. %A Quyen, N. B. %J Journal of Mechanics %V 30 %N 2 %P 123-128 %D 2014-04-01 %I Oxford University Press %~ DeepDyve