%0 Journal Article %T Optical beam steering using a 2D MEMS scanner %A Pétremand, Yves %A Epitaux, Marc %A Hauffe, Ralf %A Noell, Wilfried %J Proceedings of SPIE %V 6715 %N 1 %P 671502-671502-9 %@ 0277-786X %D 2007-10-08 %I SPIE %~ DeepDyve