%0 Journal Article
%T Design strategy of small topographical guiding templates for sub-15nm integrated circuits contact hole patterns using block copolymer directed self assembly
%A Yi, He
%A Bao, Xin-Yu
%A Tiberio, Richard
%A Wong, H.-S. Philip
%J Proceedings of SPIE
%V 8680
%P 868010-868010-9
%@ 0277-786X
%D 2013-03-26
%I SPIE
%~ DeepDyve