%0 Journal Article
%T Impact of nitride and temperature treatment for AlGaN thin films
%A Garcia-Perez, Roman
%A Castillo, Jorge
%A Datta, Shamik
%A Biswas, Prosanto
%A Huq, Hasina
%J Bulletin of Materials Science
%V 45
%N 3
%@ 0250-4707
%D 2022-08-08
%I Indian Academy of Sciences
%~ DeepDyve