%0 Journal Article
%T Fabrication of iridium oxide neural electrodes at the wafer level
%A Zhang, He
%A Pei, WeiHua
%A Zhao, ShanShan
%A Yang, XiaoWei
%A Liu, RuiCong
%A Liu, YuanYuan
%A Wu, Xian
%A Guo, DongMei
%A Gui, Qiang
%A Guo, XuHong
%A Xing, Xiao
%A Wang, YiJun
%A Chen, HongDa
%J "Science China Technological Sciences"
%V 59
%N 9
%P 1399-1406
%@ 1674-7321
%D 2016-09-01
%I Science China Press
%~ DeepDyve