%0 Journal Article
%T Development of a high-speed, phase-sensitive laser probe system for RF surface/bulk acoustic wave devices with an autofocus function for long-time continuous operation
%A Kawai, Kazuki
%A Takahashi, Hikaru
%A Omori, Tatsuya
%A Hashimoto, Ken-ya
%J Japanese Journal of Applied Physics
%V 61
%N SG
%P 5
%@ 0021-4922
%D 2022-07-01
%I IOP Publishing
%~ DeepDyve