%0 Journal Article
%T A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology
%A Chen, Chi-Feng
%A Shen, Chih-Hsiung
%A Yeh, Yun-Ying
%J Sensors
%V 21
%N 1
%@ 1424-8220
%D 2020-12-29
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve