%0 Journal Article
%T Alkali-Developable Organosilicon Positive Photoresist(OSPR)
%A Sugiyama, Hisashi
%A Inoue, Takashi
%A Mizushima, Akiko
%A Nate, Kazuo
%J Proceedings of SPIE
%V 92
%P 268-273
%@ 0277-786X
%D 1988-01-01
%I SPIE
%~ DeepDyve