%0 Journal Article
%T Thermally actuated microshutter for MOEMS applications
%A Langley, Derrick
%A Rogers, Stanley
%J Proceedings of SPIE
%V 7208
%N 1
%P 720809-720809-10
%@ 0277-786X
%D 2009-02-12
%I SPIE
%~ DeepDyve