%0 Journal Article
%T A new microtensile tester for the study of MEMS materials with the aid of atomic force microscopy
%A Chasiotis, Ioannis
%A Knauss, Wolfgang
%J Experimental Mechanics
%V 42
%N 1
%P 51-57
%@ 0014-4851
%D 2006-01-27
%I Kluwer Academic Publishers
%~ DeepDyve