%0 Journal Article
%T Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization
%A Baklykov, Dmitry  A.
%A Andronic, Mihail
%A Sorokina, Olga  S.
%A Avdeev, Sergey  S.
%A Buzaverov, Kirill  A.
%A Ryzhikov, Ilya  A.
%A Rodionov, Ilya  A.
%J Micromachines
%V 12
%N 5
%@ 2072-666X
%D 2021-05-08
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve