%0 Journal Article
%T Electrostatic chucking of EUVL reticles
%A Nataraju, Madhura
%A Van Peski, Chris K.
%J Proceedings of SPIE
%V 6517
%N 1
%P 65170Y-65170Y-8
%@ 0277-786X
%D 2007-03-16
%I SPIE
%~ DeepDyve