%0 Journal Article
%T Phase Imaging of Extreme-Ultraviolet Mask Using Coherent Extreme-Ultraviolet Scatterometry Microscope
%A Harada, Tetsuo
%A Nakasuji, Masato
%A Nagata, Yutaka
%A Watanabe, Takeo
%A Kinoshita, Hiroo
%J Japanese Journal of Applied Physics
%V 52
%N 6S
%@ 0021-4922
%D 2013-06-01
%~ DeepDyve