%0 Journal Article
%T Comparison analysis of energy loss between micro clamped–clamped and clamped-free beam in vertical motion flux modulation magnetic sensor
%A Li, Wenyin
%A Pan, Mengchun
%A Wu, Xuezhong
%A Xiao, Dingbang
%A Tian, Wugang
%A Hu, Jiafei
%A Hou, Zhanqiang
%A Zhao, Jianqiang
%A Hu, Jinghua
%J Microsystem Technologies
%V 23
%N 6
%P 1991-1997
%@ 0946-7076
%D 2016-06-13
%I Springer Berlin Heidelberg
%~ DeepDyve