%0 Journal Article %T Improvement of resolution by maximum entropy linear image restoration for NiSi2/Si interface %A Chen,, Fu-Rong %A Kai, J., J. %A Chang,, L. %A Wang, J., Y. %A Chen, W., J. %J Journal of Electron Microscopy %V 48 %N 6 %@ 2050-5698 %D 1999-01-01 %I Narnia %~ DeepDyve