%0 Journal Article %T Structure-Integrated Thin-Film Supercapacitor as a Sensor %A Petersen, Jan %A Kube, Alexander %A Geier, Sebastian %A Wierach, Peter %J Sensors %V 22 %N 18 %@ 1424-8220 %D 2022-09-13 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve