%0 Journal Article
%T Fabrication and Characterization of Bending- Independent Capacitive CMOS Pressure Sensor Stacks
%A Fischer, Roland
%A Ditler, Heinrich
%A Görtz, Michael
%A Mokwa, Wilfried
%J Current Directions in Biomedical Engineering
%V 4
%N 1
%P 595-598
%D 2018-09-01
%I De Gruyter
%~ DeepDyve