%0 Journal Article %T Fabrication and evaluation of an on-chip liquid micro-variable inductor %A El Gmati, Issam %A Calmon, Pierre Francois %A Boukabache, Ali %A Pons, Patrick %A Fulcrand, Rémy %A Pinon, Stéphane %A Boussetta, Hatem %A Kallala, Mouhamed Adel %A Besbes, Kamel %J Journal of Micromechanics and Microengineering %V 21 %N 2 %P 9 %@ 0960-1317 %D 2011-02-01 %~ DeepDyve