%0 Journal Article
%T P‐6: A Novel Self‐Aligned Lightly‐Doped‐Drain Polysilicon Thin‐Film Transistor Using a Partial Exposure Technique
%A Xiong, Zhibin
%A Liu, Haitao
%A Sin, Johnny K. O.
%J Sid Symposium Digest of Technical Papers
%V 35
%N 1
%@ 0097-966X
%D 2004-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve