%0 Journal Article %T Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators %A Hara, Motoaki %A Yokoyama, Tsuyoshi %A Sakashita, Takeshi %A Taniguchi, Shinji %A Iwaki, Masafumi %A Nishihara, Tokihiro %A Ueda, Masanori %A Satoh, Yoshio %J Japanese Journal of Applied Physics %V 49 %N 7S %@ 0021-4922 %D 2010-07-01 %~ DeepDyve