%0 Journal Article
%T High-resolution white light scanning stitching measurement of full-surface microstructure
%A Guo, Jingyang
%A Zhai, Dede
%A Chen, Shanyong
%A Lu, Wenwen
%J Proceedings of SPIE
%V 12169
%P 12169BE-12169BE-12
%@ 0277-786X
%D 2022-03-27
%I SPIE
%~ DeepDyve