%0 Journal Article %T Distributed Intelligent MEMS %A Liang, Junbin %A Cao, Jiannong %A Liu, Rui %A Li, Tao %J ACM Computing Surveys (CSUR) %V 49 %N 1 %P 1-29 %@ 0360-0300 %D 2016-06-29 %I ACM %~ DeepDyve