%0 Journal Article
%T Characterization of laser-annealed polysilicon by spectroscopic ellipsometry and comparison to other techniques
%A Boher, Pierre
%A Suzuki, Y.
%J Proceedings of SPIE
%V 2873
%N 1
%P 294-296
%@ 0277-786X
%D 1996-08-16
%I SPIE
%~ DeepDyve