%0 Journal Article
%T SPM system for semiconductor device applications
%A Itoh, Hiroshi
%A Odaka, Takahiro
%A Niitsuma, Junichi
%J Microscopy
%V 63
%N suppl_1
%P i13-i13
%@ 0022-0744
%D 2014-11-01
%I Oxford University Press
%~ DeepDyve