%0 Journal Article
%T Toughening Thin‐Film Structures with Ceramic‐Like Amorphous Silicon Carbide Films
%A Matsuda, Yusuke
%A Ryu, Ill
%A King, Sean W.
%A Bielefeld, Jeff
%A Dauskardt, Reinhold H.
%J Small
%V 10
%N 2
%P 253-257
%@ 1613-6810
%D 2014-01-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve