%0 Journal Article %T Photoetching of Copper Surface with Photosensitive Polymeric Coatings %A Anfinogenov, V. %A Sirotkina, E. %A Domina, N. %A Khlebnikov, A. %J Russian Journal of Applied Chemistry %V 74 %N 11 %P 1947-1949 %@ 1070-4272 %D 2004-10-13 %I Kluwer Academic Publishers-Plenum Publishers %~ DeepDyve